烧结温度对Nb2O5-x靶材性能的影响

The influence of sintering temperature on properties of Nb2O5-xtarget material

摘要:

采用真空烧结法制备 Nb2O5-x靶材,研究了烧结温度对靶材的相结构、脱氧率、密度以及电阻率的影响.控制靶材的真空烧结温度,可以制备出综合性能优良的 Nb2O5-x靶材.实验结果表明:在真空烧结温度为1200 ℃时,靶材的非化学计量比为 Nb2O4.59,其各项性能指标最佳:靶材的电阻率2.32 mΩ· cm、密度4.85 g/cm3、脱氧量2.47 ，.

Abstract:

Nb2O5-xtargets were prepared by vacuum sintering process.The effects of sintering temperature on the phase structure,weight loss,density and electrical resistivity of the target were investigated.The excellent comprehensive properties Nb2O5-xtargets can be prepared by control the sintering temperature.The results show that the non-stoichiometric is Nb2O4.59when the vacuum sintering temperature is 1200℃,and the properties is the best.At this time,the electrical resistivity is 2.32 mΩ· cm,the target density is 4.85 g/cm3,and the weight loss is 2.47，.