Study of relationship between structure and transmittance of diamond-like carbon (DLC) films

摘要:

Abstract:

In this paper, the transparent hard diamond-like carbon (DLC) films were deposited on glass substrate by magnetic confined radio-frequency plasma chemical vapor deposition. The structure of films was studied by Raman spectra and X-ray photoelectron spectra (XPS), the transmittance of films by Spectrophotometer. The mechanism of the influence of films structure on transmittance of the films was discussed. The results show that the thickness of films was lower than 100nm, and the transmittance was over 90， in 380-780 nm region. Discussion in theory on the influence of film structure on transmittance was correspondence to experiment results.