Abstract:The LiSiPON electrolyte films were prepared by magnetron sputtering method with different N2working pressure. The structure, morphology, composition and the relationship between ionic conductivity and N content were studied in detail. The result showed that N content in the films depended on N2partial pressure. With the N2 partial pressure increasing, N content increased firstly and gained a maximum values then decreased. N content in the LiSiPON films affected the ionic conductivity of the films.The ionic conductivity of the films increased with the N content increasing, and could reach a maximum value 10. 4× 10-6S/cm.
