氮化硅陶瓷微波烧结几何参数对电磁场分布影响规律的研究

Study on the Influence Law of Geometrical Parameters of Microwave Sintered Silicon Nitride Ceramic Materials on Electromagnetic Field Distribution

摘要:

在微波烧结过程中，烧结试样内部电场分布情况对试样烧结过程起决定性的作用。采用HFSS仿真软件，对一种加载氮化硅试样的5馈口微波烧结腔进行模拟仿真。同时，研究了试样的半径、高度及放置位置对微波电场的影响规律。模拟结果表明：当试样半径在42—44 mm左右时,内部电磁场分布均匀；随着试样高度的增加，电场的均匀性先下降后上升到最大值后又下降，试样高度在92—94 mm处附近时内部电磁场分布较为均匀、场强梯度小；随着放置高度的增加，试样内均匀性上升，但超过一定高度后电磁场均匀性下降；经比较研究，得出电磁场分布均匀、符合烧结要求的最佳烧结试样尺寸为高度93 mm、半径44 mm、放置高度215 mm。

Abstract:

The internal electric field distribution of the sintered sample plays a decisive role in the microwave sintering process. The HFSS simulation software is used to simulate a 5-feeder microwave sintering cavity loaded with silicon nitride samples. The influence of the radius， height and placement position of the sample on the microwave electric field is studied by simulation. The simulation analysis shows that when the sample radius is around 42—44 mm， the internal electromagnetic field is evenly distributed. As the sample height increases， the uniformity of the electric field first decreases， then rises to the maximum value， and then decreases again. The sample height is around 92—94 mm. The internal electromagnetic field distribution is relatively uniform， and the field strength gradient is small； as the placement height increases， the uniformity of the sample increases， but after a certain height， the electromagnetic field uniformity decreases； the comparison shows that the optimal sintered sample size is 93 mm in height and 44 mm in radius ， and 215 mm in placement height.