物理气相沉积高熵合金涂层/薄膜性能研究进展

Research Progress on Properties of High Entropy Alloy Coatings/Films

摘要:

高熵合金多主元素混合会导致高混合熵、严重的晶格畸变、缓慢扩散效应及鸡尾酒效应等，因此表现出迥异的特性，如具有优异的力学性能、热稳定性、耐蚀性、耐磨性、抗氧化性、抗压强度等。将高熵合金的设计理念同表面涂层/薄膜技术相结合制备高熵合金涂层/薄膜，这种薄膜通常展现出同块体高熵合金的相似性能，甚至优于块体高熵合金，在诸多领域具有巨大的应用潜力。重点总结了典型高熵合金涂层/薄膜的的硬度、弹性模量、热稳定性、耐腐蚀性能及耐磨性能的研究进展，并展现了提高高熵合金涂层/薄膜的性能方法及其机理，最后对高熵合金涂层/薄膜的光能吸收涂层、辐射耐受性、生物腐蚀、电子、耐磨性等未来发展方向进行了一定的展望。

Abstract:

The mixing of multiple chemical elements of high entropy alloys will lead to high mixing entropy， severe lattice distortion， slow diffusion and ‘cocktail’ effects， which shows different characteristics， such as excellent mechanical properties， thermal stability， corrosion resistance， wear resistance， oxidation resistance and compressive strength. Combining the design concept of high entropy alloy with surface technologies to prepare high entropy alloy coatings/thin films， which usually show similar properties as the high entropy alloy block materials， or even better properties than the high entropy alloy block materials. High entropy alloy coatings/thin films have great potentials in many application fields. This review paper focuses on the recent progresses of different ways to improve the hardness， elastic modulus， thermal stability， corrosion resistance and wear resistance of high entropy alloy coatings/films. Finally， the future development directions of high entropy alloy coatings/films are prospected.