氧化铟基透明导电薄膜的研究进展

Research Progress of Indium Oxide-Based Transparent Conductive Thin Film

摘要:

透明导电氧化物（TCO）薄膜因其兼具透明和导电的特性，被广泛应用于各个领域中。氧化铟（In₂O₃）基TCO薄膜，因其高透明度、低电阻率、高迁移率和良好的化学稳定性而备受关注。综述了In₂O₃基TCO薄膜的研究进展，介绍了TCO薄膜种类及其常见的制备方法，归纳分析了锡掺In₂O₃（ITO）、钼掺In₂O₃（IMO）、钨掺In₂O₃（IWO）、钛掺In₂O₃（InTiO）等几种典型的In₂O₃基TCO薄膜研究现状，并对TCO薄膜未来的发展趋势进行了总结和展望。

Abstract:

Transparent conductive oxide （TCO） thin films have been widely used in various fields due to their transparent and conductive properties. Indium oxide （In₂O₃） based TCO thin films have attracted much attention because of their high transparency， low resistivity， high mobility， and good chemical stability. In this paper， the research progress of In₂O₃-based TCO thin films is reviewed， and the types of TCO thin films and their common preparation methods are introduced. Besides， the research status of several typical In₂O₃-based TCO thin films such as tin-doped In₂O₃ （ITO）， molybdenum-doped In₂O₃ （IMO）， tungsten-doped In₂O₃ （IWO）， and titanium-doped In₂O₃ （InTiO） is summarized and analyzed. Finally， the future development trend of TCO films is summarized and prospected.