CrTiAlCuN thin films were prepared by ion beam assisted magnetron sputtering. The structure and main mechanical properties of the film were analyzed by scanning electron microscope (energy spectrometer)，X-ray diffractometer (XRD)，hardness tester, scratch tester and friction and wear tester. The results show that the thickness of the prepared CrTiAlCuN film is about 2.0 m，and the film is fine and dense with typical columnar crystal growth. The main element in the film is Cr，the content of which accounts for about 40 at.%. The crystal structure and lattice constant of the film are similar to CrN film, and some of the Cr atoms in the crystal lattice are replaced by Ti and Al. The microhardness of the film is 3255 Hv, the binding force is 74 N, and the friction coefficient is reduced to 0.366 with the introduction of Cu. Finally, the film has excellent comprehensive properties.
